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詳細(xì)介紹
Measurement Features | FilmTek™ 4000 / 4500 |
Index of Refraction折射率 | ±0.00002 |
Thickness Measurement Range 膜厚范圍 | 3nm-350µm |
Maximum Spectral Range (nm) 大光譜范圍 | 190-1700nm |
Standard Spectral Range (nm) 標(biāo)準(zhǔn)光譜范圍 | 380-1000nm |
Reflection 反射 | Yes |
Transmission 透射 | Yes(4500) |
Spectroscopic Ellipsometry 橢圓光譜技術(shù) | No |
Power Spectra Density 功率譜密度 | Yes |
Multi-angle Measurements 多角度測量(DPSD) | Yes |
TE & TM Components of Index TE和TM成分指數(shù) | Yes |
Multi-layer thickness 多層厚度 | Yes |
Index of Refraction 折射率 | Yes |
Extinction (absorption) Coefficient 消光(吸收)系數(shù) | Yes |
Energy band gap 能帶隙 | Yes |
Composition 組成 | Yes |
Crystallinity 結(jié)晶度 | Yes |
Inhomogeneous Layers 非均勻?qū)?/span> | Yes |
Surface Roughness 表面粗糙度 | Yes |
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