mfc330 MFC氣體質(zhì)量流量控制器

介質(zhì)要求 Applicable media

潔凈干燥氣體 Clean, dry gases

氣體種類 Gas type

98+氣體可選 Available for 98+ types of gas

量程 Full Scale（N2 equivalent）

0-2, 10, 20, 50, 100, 300, 500 sccm；0-1, 2, 5, 10, 20, 30 slpm

測量范圍measurement range

0.5%F.S. (1:200)

控制范圍 Control range

1% - 1  00% F.S. (1:100)

準(zhǔn)確度 Accuracy

標(biāo)準(zhǔn) Standard：±1% F.S.   高精度High Performance：±0.5%

重復(fù)精度Repeatability

±0.2% F.S.

線性度Linearity

±0.2% F.S.

控制響應(yīng)時間 Settling time (in control)

<3秒  

預(yù)熱時間 Warm-up time

5 min (T95), 30分鐘   30min for optimum accuracy

閥門Valve function

常閉式 Normally Closed

泄露率 Leak integrity

1*10-8 Pa·m3/sec He

工作壓力 Maximum pressure

3 MPa (30bar）

工作壓差范圍 Operating differential pressure

0 ~ 1 MPa

工作溫度范圍Operating temperature range

-20 ~ 65℃ (環(huán)境和氣體 ambient and gas)

濕度范圍 Relative humidity range

0 ~ 98% 無凝露 No-condensing

氣路接頭類型Process connections

卡套,、VCR、快插、快擰 (可選)

(Push-in fitting, Push-on fitting, Compression fitting, VCR optional)

氣體接觸材質(zhì)Material

氟橡膠、304/316不銹鋼 (FKM, 300-series Stainless steel)

密封材質(zhì)Seals

氟橡膠 FKM

防護(hù)等級 Ingress protection (housing)

IP40

安裝方式 Mounting

水平安裝方向校準(zhǔn) Calibrated in horizontal mounting orientation

固定孔 Mounting holes

M4   5mm

重量 Weight

0.96 kg

電氣連接接口類型Electrical connection

DB – 9公頭 (Male)

模擬信號 Analog input and output options

0 – 5 VDC, 4 – 20 mA （可定制）

輸入輸出阻抗 Impedance resistance

輸入阻抗>10MΩ,輸出阻抗<1KΩ

模擬數(shù)據(jù)更新頻率Analog data update rate

200Hz

數(shù)字信號 Digital input and output options

Modbu RTU (RS232, RS485), CAN

通信速率 Digital data update rate

9600(默認(rèn)), 14400, 19200, 38400, 56000, 57600, 115200 bps（用戶可修改）

電源 Power requirements

15 – 40 VDC,<200mA

顯示更新頻率Display update rate

50Hz

模擬信號精度 Analog signal accuracy

±0.05%F.S.

標(biāo)況 STP reference conditions

20℃， 1 atm

氣體選擇Gas Select

可選，具體參考說明書氣體系數(shù)

軟件Software

Aitoly分階流量軟件

Full scale flow

Height

Width

Depth

A

B

C

D

E

重 量

2 sccm~30 slpm

125.00 mm

76.00 mm

32.00 mm

64.00 mm

17.80 mm

7.00 mm

6.00 mm

M4     5mm

≈0.96 kg

4.921 in

2.992 in

1.260 in

2.520 in

0.701 in

0.276 in

0.236 in

M4     0.197 in

≈2.1 lb

100slpm-500slpm

138mm

82mm

38mm

62.mm

30mm

4mm

10mm

M4     8mm

1.3kg

5.43in

3.22

1.496

2.220

1.181

0.157

0.393

M4    0.31in

2.88lb