The Tribo CMP system is a precision engineered, bench top solution designed with one thing in mind - the research of wafer processes, including their associated wafer, pad and slurry interactions. Primary application areas for the Tribo system are in the field of CMP planarization or delayering,

with secondary applications in the field of Tribological science and research.

Ø Superior real time analytical capabilities

Ø Consistent, repeatable performance

Ø Enhanced control at your fingertips

Ø Adaptable and portable - Logitech quality as standard