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當前位置:上海納騰儀器有限公司>>輪廓儀>> μScanNanoFocus μScan(激光掃描輪廓儀)
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產(chǎn)品型號μScan
品 牌
廠商性質(zhì)代理商
所 在 地上海市
更新時間:2024-06-17 16:00:45瀏覽次數(shù):1861次
聯(lián)系我時,請告知來自 化工儀器網(wǎng)AF2 自動對焦(Autofocus)
借由探測器的回饋訊號調(diào)整物鏡位置,得到待測物焦點,而獲得待測物的確實高度(如下左圖)。
CF4 共軛焦(Confocal, Laser)
激光光束經(jīng)由物鏡迅速上下移動聚焦于待測物上,此時偵測器能經(jīng)由孔洞得到zui大光的強度,如此偵測器根據(jù)此訊號確定其位置(如下右圖)。
AF2
CF4
n 應用
ü 集成電路封裝和表面貼片技術
ü 厚膜混合電路:膜厚度的自動化測量
ü 精密部件
[1] BGA [2] thick film [3] dispenser dots [4] laminate
n 技術參數(shù)
Scan modules | Measuring range in x,y-direction [mm] | Resolution in x,y-direction [mm] | Positioning range in z-direction [mm] | Max. measuring speed [mm/s] |
SC 50 | 50X50 | 0.5 | 100 | 50 |
SC 100 | 100x100 | 0.5 | 100 | 50 |
SC 150 | 150x150 | 0.5 | 100 | 50 |
SC 200 | 200x200 | 0.5 | 100 | 50 |
other dimensions on request |
Sensors | Resolution z [μm] | Resolution x,y [μm] | Working distance [mm] | Measuring range in z-direction [mm] | Camera (optional) | |
Confocal point sensor | CF 4 | 0.02 | 1 | 4 | 1.0 | off-axis |
| CF 13 | 0.02 | 1 | 13 | 1.0 | (BMT5) |
Autofocus sensor | AF 2 | 0.025/0.0111) | 1 | 2 | 1.5/0.651) | integrated |
AF 5 | 0.025/0.0111) | 1 | 5 | 1.5/0.651) | (BMT3) | |
Chromatic white light sensor | CRT 52) | 0.010 | 4 | 5 | 0.3 | off-axis (BMT5) |
CRT 122) | 0.025 | 4 | 12 | 1.0 | ||
CRT 162) | 0.075 | 8 | 16 | 3.0 | ||
Holographic sensor | CP 15 | 3.0 | 12 | 12 | 1.8 | integrated (BMT 4) |
CP 42 | 6.0 | 15 | 42 | 8.0 | ||
CP 65 | 10.0 | 25 | 65 | 18.0 | ||
1) with restricted measuring range 2) with 1, 4 or 30 kHz measuring frequency available |
Modules | |
System controller | High performance industrial PC, DVD-Writer, network card, Windows XP Professional |
Cabinet and work table MT 70 | Stable container for electronic modules with work table 1550x800x750 (lxh in mm) |
Granite measuring stand MP 100 | Portal construction, 660x450x497 (lxh in mm) for SC 50 to SC 150 |
Granite measuring stand MP 200 | Portal construction, 680x480x385 (lxh in mm) from SC 200 |
NF μsoft standard software | NanoFocus control and evaluation software, profile and topography representation, roughness calculation compliant with DIN EN ISO |
Options | |
NF 3D-Plus | Photo-realistic 3D presentation of topographical data (OpenGL) |
NF Active X | Interface modules to program individual measurement processes and calculations (Excel/VBA) |
NF Hybridmaster | Automation tool for the use of μscan® in thick film production incl. SPC and teach in module |
NF Flatmaster | Automated measurement of straightness, flatness and warpage |
NF Solder | Automated off-line measurement of fine pitch solderpaste print in SMT production |
NF AutoScan | Automated measurement of profiles and surfaces at arbitrary measurement points |
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