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NanoFocus μScan(激光掃描輪廓儀)

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產(chǎn)品型號μScan

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更新時間:2024-06-17 16:00:45瀏覽次數(shù):1861次

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AF2 自動對焦(Autofocus)

借由探測器的回饋訊號調(diào)整物鏡位置,得到待測物焦點,而獲得待測物的確實高度(如下左圖)。

CF4 共軛焦(Confocal, Laser)

激光光束經(jīng)由物鏡迅速上下移動聚焦于待測物上,此時偵測器能經(jīng)由孔洞得到Z大光的強度,如此偵測器根據(jù)此訊號確定其位置

AF2 自動對焦(Autofocus)

借由探測器的回饋訊號調(diào)整物鏡位置,得到待測物焦點,而獲得待測物的確實高度(如下左圖)。

CF4 共軛焦(Confocal, Laser)

激光光束經(jīng)由物鏡迅速上下移動聚焦于待測物上,此時偵測器能經(jīng)由孔洞得到zui大光的強度,如此偵測器根據(jù)此訊號確定其位置(如下右圖)。

AF2
 
CF4

n         應用

ü         集成電路封裝和表面貼片技術

ü         厚膜混合電路:膜厚度的自動化測量

ü          精密部件

[1] BGA        [2] thick film     [3] dispenser dots     [4] laminate
n         技術參數(shù)

Scan modules

Measuring range in x,y-direction [mm]

Resolution in x,y-direction [mm]

Positioning range in z-direction [mm]

Max. measuring speed [mm/s]

SC 50

50X50

0.5

100

50

SC 100

100x100

0.5

100

50

SC 150

150x150

0.5

100

50

SC 200

200x200

0.5

100

50

other dimensions on request

 

Sensors

Resolution z [μm]

Resolution x,y [μm]

Working distance [mm]

Measuring range in z-direction [mm]

Camera (optional)

Confocal point sensor

CF 4

0.02

1

4

1.0

off-axis

 

CF 13

0.02

1

13

1.0

(BMT5)

Autofocus sensor

AF 2

0.025/0.0111)

1

2

1.5/0.651)

integrated

AF 5

0.025/0.0111)

1

5

1.5/0.651)

(BMT3)

Chromatic white light sensor

CRT 52)

0.010

4

5

0.3

off-axis (BMT5)

CRT 122)

0.025

4

12

1.0

CRT 162)

0.075

8

16

3.0

Holographic sensor

CP 15

3.0

12

12

1.8

integrated

(BMT 4)

CP 42

6.0

15

42

8.0

CP 65

10.0

25

65

18.0

1) with restricted measuring range 2) with 1, 4 or 30 kHz measuring frequency available

 

Modules

 

System controller

High performance industrial PC, DVD-Writer, network card,

Windows XP Professional

Cabinet and work table MT 70

Stable container for electronic modules with work table

1550x800x750 (lxh in mm)

Granite measuring stand MP 100

Portal construction, 660x450x497 (lxh in mm) for SC 50 to SC 150

Granite measuring stand MP 200

Portal construction, 680x480x385 (lxh in mm) from SC 200

NF μsoft standard software

NanoFocus control and evaluation software, profile and topography

representation, roughness calculation compliant with DIN EN ISO

 

 

 

 

Options

 

NF 3D-Plus

Photo-realistic 3D presentation of topographical data (OpenGL)

NF Active X

Interface modules to program individual measurement processes and

calculations (Excel/VBA)

NF Hybridmaster

Automation tool for the use of μscan® in thick film production incl. SPC and

teach in module

NF Flatmaster

Automated measurement of straightness, flatness and warpage

NF Solder

Automated off-line measurement of fine pitch solderpaste print in SMT production

NF AutoScan

Automated measurement of profiles and surfaces at arbitrary measurement

points

 

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