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ES622 Series TLP Pulsed IV-Curve System

1. Description

The model ES622 Series TLP Pulsed IV-Curve System is an advanced IV-curve characterization system designed to simulate ESD events (TLP/ VF-TLP/ HMM/ HBM/MM pulse) and monitor a device (semiconductors, discrete, circuit modules, etc.) in high power time domain. The ES622 has a higher specification, more functionality, greater expansion capability and better software experience compared to the previous model ES620 and ES621.

The TLP (transmission line pulse) test function is designed to meet the latest ANSI/ESD STM5.5.1 test standard and applies high quality rectangular pulses to devices and records both the voltage across and current through the device. This gives pulsed IV curves, allowing users to characterize a device’s transient response over ns time windows. Advanced automatic device failure detection methods are incorporated, such as DC Spot Check (V or I), Static IV curve, Fuse, Breakdown, and Bias Source Fluctuation.

The VF-TLP test is designed to simulate the CDM speed ESD event and captures the voltage across the DUT and current through the DUT under a high speed (such as <100 ps rise-time) ESD transient. This allows the user to study the response speed and peak clamping voltage of a device.

The HMM (Human Metal Model) test function is an alternative test method to IEC61000-4-2 system level ESD. It gives the equivalent waveform to an ideal standard waveform for low ohm devices and eliminates many IEC gun test problems for components or wafer level tests, such as repeatability, imprecision gun tip, impedance mismatches, EMI interferences from unshielded relays and special setup with large ground plane and coupling plane etc.

2. Features

Most configurable TLP Pulsed IV-Curve System
Ultra-Compact Design System
Fast test speed with multi-thread processing
20 A, 40A, 50 A, 100 A, 125A, 150 A models are available (Customization available)
Advanced system and accessory monitor and control in software available
(switch lifespan monitor, E-Cal module, oscilloscope attenuation adjustment)
Test Function Expandable with vf-TLP, CC-TLP, HMM, HBM, MM options
Multiple automatic failure detection methods
(DC spot check (V or I) or IV sweep, fuse, breakdown, and bias current change)
Software controlled pulsing: Burst, Continuous, IV-Curve Characterization
Rise-Time options from 40 ps to 1200 ns *(depends on model, customization available)
Pulse-Width options from 1 ns to 2000 ns *(depends on model, customization available)

Note*: Longer pulse applications are supported by EOS series with pulse width from few hundred of ns to few ms.

3. Applications

ESD performance characterization
Wafer/ package level ESD test
System / circuit module ESD test
Safe operation area (SOA) test
Charge recovery time test
Solar panel diode characterization
Touchscreen ITO trace fuse and breakdown test

Related Standards:

TLP / VF-TLP option meets ANSI/ESD STM 5.5.1
HMM option meets ANSI/ESD SP5.6
HBM option meets ANSI/ESDA/JEDEC JS-001
MM option meets ANSI/ESDA SP5.2

4. Specifications

ES622 Series TLP Unit Specifications

Typical Models	ES622-20	ES622-50	ES622-100	ES622-125	ES622-150	Unit	*Special models such as 40, 100, 200+ A are available per request
Output voltage @ Open load	± 0.5 ~ 1000	± 0.5 ~ 2500	± 0.5 ~ 5000	± 0.5 ~ 6250	± 0.5 ~ 7500	V
Min Voltage step @ Open load	0.1	0.1	0.1	0.1	0.1	V
Output current @ Short load	± 0.01 ~ 20	± 0.01 ~ 50	± 0.01 ~ 100	± 0.01 ~ 125	± 0.01 ~ 150	A
Voltage precision	Accuracy adjustable between 1 – 10 %					%	Speed / accuracy software adjustable
Fastest rise-time* (default 20-80%)	≤ 50	≤ 200	≤ 300	≤ 300	≤ 300	ps	Fastest 10-90% 40 ps risetime is available with special configuration
Rise-time range	0.05 ~ 1200	0.2 ~ 1200	0.3 ~ 1200	0.3 ~ 1200	0.3 ~ 1200	ns
Rise-time options	Unlimited programable or manual options						per customization
Pulse-width (default 50-50%)	100 ± 1					ns	Default
Min Pulse-width	0.5	1	5	5	5	ns
Max Pulse-width	2000	2000	1500	1500	1000	ns
Pulse-width options	Unlimited programable or manual options						per customization
Test Speed	Typical 0.2 ~ 2					Sec	Varies between hardware setups
Dimensions	347 W X 300 D X 145 H					mm	May change per customization
Weight	8	8	8	10	12	kg
Supported Oscilloscopes	Major Series from Tektronix, Agilent, LeCroy, Rigol.						Others supported on request
Supported SMU	Keithley 24xx/26xx series SMU						Others supported on request

ES62X-HMM2 External Human Metal Model (HMM) Module
(short circuit DUT, 100 ? HMM per ANSI/ESD SP5.6)

@ Typical Models	ES620-20	ES620-50	ES622-100	ES620-125	ES620-150	Unit	Comments
IEC equivalent level	6	12	24	30	36	kV
HMM peak current	22.5	45	90	112.5	135	A	3.75 A per 1 kV ≤ ± 10 % IEC 61000-4-2 (R=330?, C=150pF)
HMM current @ 30 ns	12	24	48	60	72	A	≤ ± 10 % (better than ±30% IEC)
HMM current @ 60 ns	6	12	24	30	36	A	≤ ± 10 % (better than ±30% IEC)

ES62X-HBM2 External Human Body Model (HBM) Module
(ANSI/ESDA/JEDEC JS-001 R=1.5 k?, C=100 pF)

@ Typical Models	ES620-20	ES620-50	ES622-100	ES620-125	ES620-150	Unit	Comments
Maximum HBM Test Level	± 2	± 4	± 8	± 10	± 12	kV
Minimum HBM Test Level	± 50					V
Minimum Test Level Step	1					V	PCB controlled via USB
Charge Removal Resistance	10 K					Ohm
Test Speed	>= 1					S	Per Standard 1P/S
Physical Dimensions	90 X 90 X 130					mm

ES62X-MM2 External Machine Model (MM) Module
(ANSI/ESDA/JEDEC JS-001 R=1.5 k?, C=100 pF)

Parameters	MM-2K	Unit	Comments
Output Voltage	±10 ~ 2000	V
Discharge RC Value	C: 200 pF, R: 0 Ω
Short Load Peak Current Ip1	1.75±10% per 100V	A	Tolerance may be different if socket is used
Short Load Ip2	67% ~ 90% of Ip1	A
Short Load Pulse Period tpm	66 < tpm < 90	ns
500 Ω Load Peak Current Ipr	0.85 ~ 1.2	A	@ 400 V condition per standard
500 Ω Load I100	0.23 ~ 0.4	A	@ 400 V condition per standard
500 Ω Load I200	30 – 50% of measured I100	A

5. Ordering Information

Line	Part # or Option #	Description
TLP IV-Curve System Basic Configuration
1.1	ES622-20	ES622 TLP Pulsed IV-Curve System, 20 A Base Unit
1.2	ES622-25	ES622 TLP Pulsed IV-Curve System, 25 A Base Unit
1.3	ES622-40	ES622 TLP Pulsed IV-Curve System, 40 A Base Unit
1.4	ES622-50	ES622 TLP Pulsed IV-Curve System, 50 A Base Unit
1.5	ES622-60	ES622 TLP Pulsed IV-Curve System, 50 A Base Unit
1.6	ES622-80	ES622 TLP Pulsed IV-Curve System, 80 A Base Unit
1.7	ES622-100	ES622 TLP Pulsed IV-Curve System, 100 A Base Unit
1.8	ES622-125	ES622 TLP Pulsed IV-Curve System, 125 A Base Unit
1.9	ES622-150	ES622 TLP Pulsed IV-Curve System, 150 A Base Unit
Rise-time Options (example configuration only, customizable option available)
2.1	ES62x-PRT4	Programmable pulse rise-time filter X4 module (Default: Intrinsic, 1 ns, 5 ns, 10 ns, customization available)
2.2	ES62x-PRT7	Programmable pulse rise-time filter X7 module (Default: Intrinsic, 0.5ns, 1 ns, 2ns, 5 ns, 10 ns, 20ns, customization available)
2.3	ES62x-ERTF	External Manual Rise-time Filter
Pulse-width Options (example configuration only, customizable option available)
3.1	ES620-PPL4	ProgrammableInternal pulse length X4 module (Default: 5ns, 10 ns, 100 ns, 200 ns, customization available)
	ES620-PPL7	ProgrammableInternal pulse length X7 module (Default: 5ns, 10 ns, 50ns, 100 ns, 200 ns, 500ns, 1000ns, customization available)
3.2	ES620-PPL10	ProgrammableInternal pulse length X10 module (Default: 2ns, 5ns, 10 ns, 20ns, 50ns, 100 ns, 200 ns, 500ns, 1000ns, 1500ns, customization available)
3.3	ES620-MPLEx	Manual Pulse Width Extremal Change Option
ESD Injection and IV-Curve Measurement Options
4.1	ES62X-DBLM	TLP Automatic Test Software with PC
4.2	ES62X-A1	TLP IV-Curve Test Essential Accessories
4.3	ES62X-BSA	Board Level Standard TLP Test Accessories
4.4	ES62X-BVA	Board Level VF-TLP Test Accessories
4.5	ES62X-BBA	Board Level SOA Test Additional Accessories for one channel bias
4.6	ES62X-A2	Wafer Level TLP Setup Essential Test Accessories
4.7	ES62X-WSA	Wafer Level Standard TLP Test Accessories
4.8	ES62X-WVA	Wafer Level VF-TLP Test Accessories
4.9	ES62X-WBA	Wafer Level SOA Test Additional Accessories for one channel bias
4.10	CMPS-200A	Compact Manual Probe Station with Trinocular Stereo Microscope (Othe probe stations are available upon request)
External Pulse Module and measurement Options
5.1	ES62X-HBM2	Human Body Model (HBM) 2-pin Pulse Module: HBM-2: 2kV HBM module, Pairing ES622-20 & ES622-25 HBM-4: 4kV HBM module, Pairing ES622-40 & ES622-50 HBM-8: 8kV HBM module, Pairing ES622-80 & ES622-100
5.2	ES62X-HMM2	Human Metal Model (HMM) 2-pin Pulse Module: HMM-6: 6kV HMM module, Pairing ES622-20 & ES622-25 HMM-12: 12kV HMM module, Pairing ES622-40 & ES622-50 HMM-24: 24kV HMM module, Pairing ES622-80 & ES622-100
5.3	ES62X-MM2	Metal Model (MM) 2-pin Pulse Module: MM-2: 2kV MM module
5.4	HBM-BA1	HBM Board Level Test Accessories
5.5	MM-BA1	MM Board Level Test Accessories
5.6	TLP based-HMM-BA1	TLP based HMM Board Level Test Accessories
5.7	TLP based-HMM-WA1	TLP based HMM Wafer Level Test Accessories
Leakage or DC IV Measurement Options
6.1	ES62X-SSM	System Switch Module (switching between Pulse and DC test)
6.2	ES62X-STP1	SMU Transient Protector
Third Party Equipment Paired with TLP System
7.1	MISC-OSC1	Digital Oscilloscope (1 GHz, 5 Gs, 4 Ch) (Recommended for standard TLP test)
7.2	MISC-OSC6	Digital Oscilloscope (6 GHz, 20 Gs, 4 Ch) (Recommended for VF-TLP test)
7.3	KSMU2401	Keithley 2401, 20V, 1A, 1pA/100nV, 20W, 1 Channel
7.4	KSMU2450	Keithley 2450, 200V, 1A, 10fA/10nV, 20W, 1 Channel
7.5	KSMU2400	Keithley 2400, 20V, 1A, 1pA/100nV, 20W, 1 Channel
7.6	KSMU2410	Keithley 2410, 1100V, 1A, 1pA/100nV, 20W, 1 Channel
7.7	KSMU2602B	Keithley 2602B, 40V, 3A, 100fA/100nV, 40W, 2 Channel
7.8	KSMU2635B	Keithley 2635B, 200V, 10A, 0.1fA/100nV, 200W, 2 Channel
7.9	KSMUB2902A	Keithley B2902A, 210V, 10.5A, 10fA/100nV, 31.8W, 2 Channel
7.10	KPI2230-30-1	Keithley 2230-30-1 3-Channel Programmable DC Power Supply

ES622 Series TLP Pulsed IV-Curve System, Many customized specifications are available upon request.